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oai:repisalud.isciii.es:20.500.12105/225852026-02-17T12:54:20Zcom_20.500.12105_15322com_20.500.12105_2051col_20.500.12105_16967

00925njm 22002777a 4500 dc Perello-Roig, Rafel author Verd, Jaume author Barcelo, Joan author Bota, Sebastia author Segura, Jaume author 2018-10 This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices. Perello Roig R, Verd J, Barcelo J, Bota Sebastiá A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484. 10.3390/mi9100484 2072-666X Micromachines http://hdl.handle.net/20.500.13003/9108 30424417 2-s2.0-85053842111 https://hdl.handle.net/20.500.12105/22585 448554800010 MEMS resonators Mass sensors CMOS-MEMS Pierce oscillator A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection