TY  - GEN
AU  - Perello-Roig, Rafel
AU  - Verd, Jaume
AU  - Barcelo, Joan
AU  - Bota, Sebastia
AU  - Segura, Jaume
PY  - 2018
DO  - 10.3390/mi9100484
SN  - 2072-666X
UR  - https://hdl.handle.net/20.500.12105/22585
AB  - This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The...
LA  - eng
PB  - Multidisciplinary Digital Publishing Institute (MDPI)
KW  - MEMS resonators
KW  - Mass sensors
KW  - CMOS-MEMS
KW  - Pierce oscillator
TI  - A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
TY  - research article
ER  -