TY  - GEN
AU  - Perello-Roig, Rafel
AU  - Verd, Jaume
AU  - Bota, Sebastia
AU  - Segura, Jaume
PY  - 2018
DO  - 10.3390/s18093124
UR  - https://hdl.handle.net/20.500.12105/22578
AB  - We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator...
LA  - eng
PB  - Multidisciplinary Digital Publishing Institute (MDPI)
KW  - MEMS resonators
KW  - Thermomechanical noise
KW  - Sensors
KW  - CMOS-MEMS
TI  - Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators
TY  - research article
ER  -