TY  - GEN
AU  - Perello-Roig, Rafel
AU  - Verd, Jaume
AU  - Bota, Sebastia
AU  - Segura, Jaume
PY  - 2020
DO  - 10.3390/s20174663
UR  - https://hdl.handle.net/20.500.12105/22987
AB  - Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance...
LA  - eng
PB  - Multidisciplinary Digital Publishing Institute (MDPI)
KW  - MEMS resonators
KW  - VOCs
KW  - Temperature sensitivity
KW  - CMOS-MEMS
KW  - Gas sensors
TI  - Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
TY  - research article
ER  -