TY - GEN AU - Verd, Jaume AU - Segura, Jaume PY - 2019 DO - 10.3390/mi10040273 SN - 2072-666X UR - https://hdl.handle.net/20.500.12105/22737 LA - eng PB - Multidisciplinary Digital Publishing Institute (MDPI) TI - Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices TY - editorial ER -